| Code# | 525-020DP |
|---|---|
| Granite Stage | (310*220) mm |
| Glass Stage | (179.5*129.5) mm |
| X/Y Axis Travel | (150*100) mm |
| Linear Scales | Resolution: 0.5um |
| Code # | 525-020P |
|---|---|
| Granitbühne | (310*220) mm |
| Glasstadium | (179,5*129,5) mm |
| Verfahrweg der X/Y-Achse | (150*100) mm |
| X/Y-Linearschalen | Auflösung: 0,5 μm |
| Code # | 512 bis 350 |
|---|---|
| Größe der Arbeitsstadien | 355x126 mm |
| Reisen in der Arbeitsphase | 200x100mm |
| Konzentration | 90 mm |
| Genauigkeit | ≤3+L/200 (um) |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |